Consarc EB-PVD Coater
The Consarc Electron-Beam Physical Vapor Deposition (EB-PVD) system is a custom dual-stage, differentially-pumped unit specifically designed for high-rate deposition of oxide ceramic materials. The design allows the work chamber to operate in controlled pressures as high as 10 millitorr, typically in an oxygen-rich environment. Ingots are fed and rotated in the hearth, and the beam is rastered across the top surface at rates up to 1 KHz, utilizing computer-controlled scan patterns to achieve a uniform melt pool. Substrates are heated up to 1100°C in an assembly, which can also rotate to change the incidence angle of the vapor plume.
Beam Voltage: 40KV
Beam Power: 20KW maximum, 6-8 KW typical
Ingot Size: 1.00” Dia (or 1.38” Dia) x 8” length